Reactive Ion Etching Equipment-Stararc Coating Technologies (Suzhou) Co., Ltd._

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Reactive Ion Etching Equipment

MOQ ： piece

Lead Time ： Days

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Product details

Supply Ability

Supply Ability： piecesWarranty(Year)：1 Year

Packaging & Delivery

Packaging： piece

Product Specifications

Product Description

-The advantage of RIE

● Power：RF1000W，Solid state network matching box
● Process gases：Ar，O2，up to 4 lines。
● Maximum etching rate：250A/min，uniformity：±5%
● PLC plus touch screen control panel，pumping speed 45m3/hr，water cooled electrode
-Typical Application
● LED photoresistant removing
● Wafer cleaning
● Organic and oxide removing
● Reactive ion etching and ion cleaning